MOSCAP lab report

Prepare a minimum

5 page (12pt font, 1.5-spaced)

or

7.5 page (12pt font, 2-spaced)

Laboratory Report(not including appendices) describing the MOSCAP lot that was run through the CNSE’s 300mm processing line.

Use the basic format of a journal paper as your outline; with the exception that you may add relevant information in appendices that are not typically included in journal papers.

Example outline:

Abstract

Introduction to MOSCAP test structure, purpose of experiment

Experimental Setup

· Integrated flow overview

· Lot run description (table of wafer ID and target thicknesses, etc)

Results

· Review inline measurement results for relevant modules/layers

· Describe observations in captured images at key steps in process flow

· Createplots of inline test results (C-V curves) for target capacitor structure

Discussion

· Discuss results vs anticipated

Future Work

· Ideas for another, better experiment?

References

Appendices (examples)

· Step-by-Step flow

· Raw measurement data

Grading Criteria

· All sections (from example outline) completed

· Have as figures / data tables with appropriate descriptive titles

· Cartoon/Schematic(s)

· Optical Image(s)

· Example SEM image(s) (from class materials)

· EWR table

· Thickness wafer summary

· ILT results

· Display appropriate understanding in results/discussion when speaking to observations in data and images

Notes – Capacitor numbers and area

CAP1 – 1E-5cm2

CAP2 – 2E-5cm2

CAP3 – 5E-5cm2-- PLOT 3 wafer maps (show curves for all die). OVERLAY a plot of the center die result for each EWR split

CAP4 – 1E-4cm2

CAP5 – 2E-4cm2