Controlling Wafer Yields

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192187_1_1.xlsx
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Sheet1

Pressure and distance are unchaning at a low value in these 40 tests
Sample number Low Speed Sample number High Speed
1 74 21 151.1
2 78.9 22 136.8
3 90.3 23 161.8
4 82.1 24 147
5 89.4 25 154.7
6 90.9 26 143.1
7 90.2 27 150.2
8 69.2 28 150.3
9 76.2 29 135.9
10 82.2 30 141.1
11 81.9 31 145.5
12 87.3 32 149.2
13 104.9 33 152.3
14 74.4 34 168.7
15 87.7 35 152.9
16 87.8 36 146.1
17 88.9 37 161.4
18 102.7 38 178.9
19 95.9 39 160.5
20 95.5 40 142.2

Sheet2

Speed, X1 Pressure, X2 Distance, X3 Standard Deviation in coating thickness, Y
-1 -1 -1 24
0 -1 -1 120.3
1 -1 -1 213.7
-1 0 -1 86
0 0 -1 136.6
1 0 -1 340.7
-1 1 -1 112.3
0 1 -1 256.3
1 1 -1 271.7
-1 -1 0 81
0 -1 0 101.7
1 -1 0 357
-1 0 0 171.3
0 0 0 372
1 0 0 501.7
-1 1 0 264
0 1 0 427
1 1 0 730.7
-1 -1 1 220.7
0 -1 1 239.7
1 -1 1 422
-1 0 1 199
0 0 1 485.3
1 0 1 673.7
-1 1 1 176.7
0 1 1 501
1 1 1 1010