Semiconductor Facilities and Cleanroom Practices Project
Akram.Afif
Lastname_Firstname_XXX.xlsxSheet1
| 1. Normal operation | Fed. Std. 209 class = | ||||
| Number of 0.5 micron particles per cubic foot | |||||
| 2. Enhanced operation | Fed. Std. 209 class = | ||||
| Number of 0.5 micron particles per cubic foot | |||||
| 3. Disaster scenario | Fed. Std. 209 class = | ||||
| Number of 0.5 micron particles per cubic foot |
