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568 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

Review of Cooling Technologies for Computer Products

Richard C. Chu, Robert E. Simons, Michael J. Ellsworth, Roger R. Schmidt, and Vincent Cozzolino

Invited Paper

Abstract—This paper provides a broad review of the cooling technologies for computer products from desktop computers to large servers. For many years cooling technology has played a key role in enabling and facilitating the packaging and performance improvements in each new generation of computers. The role of internal and external thermal resistance in module level cooling is discussed in terms of heat removal from chips and module and examples are cited. The use of air-cooled heat sinks and liquid-cooled cold plates to improve module cooling is addressed. Immersion cooling as a scheme to accommodate high heat flux at the chip level is also discussed. Cooling at the system level is discussed in terms of air, hybrid, liquid, and refrigeration-cooled systems. The growing problem of data center thermal manage- ment is also considered. The paper concludes with a discussion of future challenges related to computer cooling technology.

Index Terms—Air cooling, data center cooling, flow boiling, heat sink, immersion cooling, impingement cooling, liquid cooling, pool boiling, refrigeration cooling, system cooling, thermal, thermal management, water cooling.

I. INTRODUCTION

E LECTRONIC devices and equipment now permeate vir-tually every aspect of our daily life. Among the most ubiquitous of these is the electronic computer varying in size from the handheld personal digital assistant to large scale main- frames or servers. In many instances a computer is imbedded within some other device controlling its function and is not even recognizable as such. The applications of computers vary from games for entertainment to highly complex systems sup- porting vital health, economic, scientific, and military activities. In a growing number of applications computer failure results in a major disruption of vital services and can even have life-threatening consequences. As a result, efforts to improve the reliability of electronic computers are as important as ef- forts to improve their speed and storage capacity.

Since the development of the first electronic digital computers in the 1940s, the effective removal of heat has played a key role in insuring the reliable operation of successive generations of computers. The Electrical Numerical Integrator and Computer (ENIAC), dedicated in 1946, has been described as a “30 ton, boxcar-sized machine requiring an array of industrial cooling

Manuscript received August 30, 2004. The authors are with the IBM Corporation, Poughkeepsie, NY 12601 USA

(e-mail: rcchu@us.ibm.com). Digital Object Identifier 10.1109/TDMR.2004.840855

fans to remove the 140 kW dissipated from its 18 000 vacuum tubes” [1]. Following ENIAC, most early digital computers used vacuum-tube electronics and were cooled with forced air.

The invention of the transistor by Bardeen, Brattain, and Shockley at Bell Laboratories in 1947 [2] foreshadowed the development of generations of computers yet to come. As a replacement for vacuum tubes, the miniature transistor gener- ated less heat, was much more reliable, and promised lower production costs. For a while it was thought that the use of transistors would greatly reduce if not totally eliminate cooling concerns. This thought was short-lived as packaging engineers worked to improve computer speed and storage capacity by packaging more and more transistors on printed circuit boards, and then on ceramic substrates.

The trend toward higher packaging densities dramatically gained momentum with the invention of the integrated cir- cuit separately by Kilby at Texas Instruments and Noyce at Fairchild Semiconductor in 1959 [2]. During the 1960s, small scale and then medium scale integration (SSI and MSI) led from one device per chip to hundreds of devices per chip. The trend continued through the 1970s with the development of large scale integration (LSI) technologies offering hundreds to thousands of devices per chip, and then through the 1980s with the development of very large scale (VLSI) technologies offering thousands to tens of thousands of devices per chip. This trend continued with the introduction of the microprocessor and continues to this day with chip makers projecting that a microprocessor chip with a billion or more transistors will be a reality before 2010.

In many instances the trend toward higher circuit packaging density has been accompanied by increased power dissipation per circuit to provide reductions in circuit delay (i.e., increased speed). The need to further increase packaging density and re- duce signal delay between communicating circuits led to the de- velopment of multichip modules beginning in the late 1970s and is continuing today. An example of the effect that these trends have had on module heat flux in high-end computers is shown in Fig. 1. As can be seen heat flux associated with Bipolar circuit technologies steadily increased from the very beginning and re- ally took off in the 1980s. There was a brief respite with the transition to CMOS circuit technologies in the 1990s; but, the demand for increased packaging density and performance re- asserted itself and heat flux is again increasing at a challenging rate.

1530-4388/04$20.00 © 2004 IEEE

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 569

Fig. 1. Evolution of module level heat flux in high-end computers.

Throughout the past 50 years, cooling and thermal manage- ment have played a key role in accommodating increases in power while maintaining component temperatures at satisfac- tory levels to satisfy performance and reliability objectives. Sections II–V of this paper will discuss the various techniques that have been used to provide temperature control in com- puters in the past and present, as well as some of the methods being explored for the future.

II. MODULE-LEVEL COOLING

Processor module cooling is typically characterized in two ways: cooling internal and external to the module package and applies to both single and multichip modules. Fig. 2 illustrates the distinction between the two cooling regimes in the context of a single-chip module.

A. Internal Module Cooling

The primary mode of heat transfer internal to the module is by conduction. The internal thermal resistance is therefore dictated by the module’s physical construction and material properties. The objective is to effectively transfer the heat from the elec- tronics circuits to an outer surface of the module where the heat will be removed by external means which will be discussed in the following section.

In the case of large multichip modules (MCMs) where variation in the location and height of chips had to be considered, an approach (Figs. 3 and 4) was adopted that employed a spring-loaded mechanical cylindrical piston touching each chip with point contact and minute physical gaps between the chip and piston and between the piston and module housing [3].

Fig. 2. Cross-section of a typical module denoting internal cooling region and external cooling region.

Fig. 3. Isometric cutaway view of an IBM TCM module with a water-cooled cold plate.

Fig. 4. Cross-sectional view of an IBM TCM module on an individual chip site basis.

The volume within the module was filled with helium gas to minimize the thermal resistance across the gaps and achieve an acceptable internal thermal resistance. The total module cooling assembly was patented as a gas-encapsulated module [4] and later named a thermal conduction module (TCM). TCM cooling technology evolved through three generations of IBM mainframes: system 3081, ES/3090, and ES/9000, with about a threefold increase in cooling capability from 19 to 64 W/cm at the chip level and 3.7 to 11.8 W/cm at the module level

570 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

Fig. 5. Cross-sectional view of a Hitachi M-880 module on an individual chip site basis.

[5]. The last generation TCM incorporated a copper piston (the original piston was aluminum) with a cylindrical center section and a slight taper on each end to minimize the gap between piston and cap while retaining intimate contact between the piston face and the chip [6]. Additionally, the volume inside the module was filled with a PAO (polyalphaolefin) oil instead of helium to reduce the piston-to-cap and chip-to-piston thermal resistances. Hitachi packaged a similar conduction scheme in their M-880 [7] and MP5800 [8] processors. Instead of a cylindrical piston Hitachi utilized an interdigitated microfin structure (Fig. 5).

In the 1990s when IBM made the switch from bipolar to CMOS circuit technology [10] the conduction cooling approach was simplified and reduced in cost by adopting a “flat plate” conduction approach as shown in Fig. 6. The thermal path from chip to cap is provided by a controlled thickness (e.g., 0.10 mm to 0.18 mm) of a thermally conductive paste. This was possible largely due to improved planarity of the substrate, better control of dimensional tolerances and enhanced thermal conductivity of the paste.

As time went on, chip power levels continued to increase. In addition, concentrated areas of high heat flux 2 to 3 times the average chip heat flux referred to as hot spots emerged. To meet internal thermal resistance requirements, in 2001 IBM chose to attach a high-grade silicon carbide (SiC) spreader to the chip with an adhesive thermal interface (ATI) and then use a more conventional thermal paste between the spreader and the cap [10]. This configuration is shown in Fig. 7.

The adhesive thermal interface (ATI), while not as thermally conductive as the thermal paste, could be applied much thinner resulting in a lower thermal resistance. SiC was chosen for the spreader material for its unique combination of high thermal conductivity and low coefficient of thermal expansion (CTE). The CTE of the SiC closely matches that of the silicon chip thus avoiding stress fracturing the interface when the module heats up during use. The thermal resistance of this package arrange- ment is lower than just using thermal paste between chip and cap because of the use of the lower thermal resistance ATI on the smaller chip area. The thermal paste thermal resistance is mitigated by applying it over a much larger area.

B. External Module Cooling

Cooling external to the module serves as the primary means to effectively transfer the heat generated within the module to

Fig. 6. Cross-sectional view of central processor module package with thermal paste path to module cap [9].

Fig. 7. MCM cross-section showing heat spreader adhesively attached to chip (adapted from [10]).

the system environment. This is accomplished primarily by at- taching a heat sink to the module. Traditionally, and prefer- ably, the system environment of choice has been air because of its ease of implementation, low cost, and transparency to the end user or customer. This section, therefore, will focus on air-cooled heat sinks. Liquid-cooled heat sinks typically re- ferred to as cold plates will also be discussed.

1) Air-Cooled Heat Sinks: A typical air-cooled heat sink is shown in Fig. 8. The heat sink is constructed of a base region that is in contact with the module to be cooled. Fins protruding from the base serve to extend surface area for heat transfer to the air. Heat is conducted through the base, up into the fins and then transferred to the air flowing in the spaces between the fins by convection. The spacing between fins can run continuously in one direction in the case of a straight fin heat sink or they can run in two directions in the case of a pin fin heat sink (Fig. 9). Air flow can either be through the heat sink laterally (in cross flow) or can impinge from the top as seen in Fig. 10.

The thermal performance of the heat sink is a function of many variables. Geometric variables include the thickness and plan area of the base plus the fin thickness, height, and spacing. The principal material variable is thermal conductivity. Also factored in is volumetric air flow and pressure drop. Many opti- mization studies have been conducted to minimize the external thermal resistance for a particular set of application conditions [11]–[13]. However, over time, as greater and greater thermal performance has been required, fin heights and fin number have increased while fin spacing has been decreased. Additionally, heat sinks have migrated in construction from all aluminum

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 571

Fig. 8. Typical air-cooled heat sink.

Fig. 9. Typical (a) straight fin heat sink and (b) pin fin heat sink.

Fig. 10. Air flow path through a heat sink: (a) cross flow or (b) impingement.

(with thermal conductivity ranging from 150–200 W/mK) to aluminum fins on copper bases (with thermal conductivity ranging from 350–390 W/mK) to all copper. In certain cases heat pipes have been embedded into heat sinks to more effec- tively spread the heat [14]–[16].

Heat sink attachment to the module also plays a role in the ex- ternal thermal performance of a module. The method of attach- ment and the material at the interface must be considered. The material at the interface is important because when two surfaces are brought together seemingly in contact with one another, sur- face irregularities such as surface flatness and surface roughness result in just a fraction of the surfaces actually contacting one another. The majority of the heat is therefore transferred through the material that fills the voids or gaps that exist between the two surfaces [17]. One method of heat sink attachment is by

mechanical means using screws or a clamping mechanism. Air has traditionally existed at the interface but more recently oils or even phase change materials (PCMs) have been used [18] to reduce the thermal resistance at the interface. Another method of attachment has been adhesively with an elastomer or epoxy. This method has worked well on smaller single-chip modules where heat sinks do not have to be removed from the module.

2) Water-Cooled Cold Plates: For situations where air cooling could not meet requirements, such as was the case in IBM’s 3081, ES/3090, and ES/9000 systems in the 1980s and early 1990s, and the case in Hitachi’s M-880 and MP5800 in the 1990s, heat was removed from the modules via water-cooled cold plates. Compared to air, water cooling can provide al- most an order of magnitude reduction in thermal resistance principally due to the higher thermal conductivity of water. In addition, because of the higher density and specific heat of water, its ability to absorb heat in terms of the temperature rise across the coolant stream is approximately 3500 times that of air. Cold plates function very similarly to air-cooled heat sinks. For example, the ES/9000 cold plate is an internal finned structure made of tellurium copper [19]. As with the air-cooled heat sinks, changes in material properties and geometry were made to improve performance. A higher thermal conductivity tellurium copper was chosen over beryllium copper used in previous generation cold plates. Additionally, fin heights were increased and channel widths (analogous to fin spacings) were decreased. The ES/9000 module also marked the first time IBM used a PAO oil at the interface between the module cap and cold plate to reduce the thermal interface resistance.

In an effort to significantly extend the cooling capability of liquid-cooled cold plates, researchers continue to work on microchannel cooling structures. The concept was originally demonstrated over 20 years ago by Tuckerman and Pease [20]. They chemically etched 50 m-wide by 300- m-deep channels into a 1 cm 1 cm silicon chip. By directing water through these microchannels they were able to remove 790 W with a temperature difference of 71 C. More recently, aluminum ni- tride heat sinks fabricated using laser machining and adhesively attached to the die have been used to cool a high-powered MCM and achieve a junction to ambient unit thermal resistance below 0.6 K-cm /W [21]. The challenge continues to be to provide a practical chip or module cooling structure and flow interconnections in a manner which is both manufacturable (i.e., cost effective) and reliable.

572 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

C. Immersion Cooling

Immersion cooling has been of interest as a possible method to cool high heat flux components for many years. Unlike the water-cooled cold plate approaches which utilize physical walls to separate the coolant from the chips, immersion cooling brings the coolant in direct physical contact with the chips. As a result, most of the contributors to internal thermal resistance are elim- inated, except for the thermal conduction resistance from the device junctions to the surface of the chip in contact with the liquid.

Direct liquid immersion cooling offers a high heat transfer co- efficient which reduces the temperature rise of the heated chip surface above the liquid coolant temperature. The magnitude of the heat transfer coefficient depends upon the thermophys- ical properties of the coolant and the mode of convective heat transfer employed. The modes of heat transfer associated with liquid immersion cooling are generally classified as natural con- vection, forced convection, and boiling. Forced convection in- cludes liquid jet impingement in the single phase regime and boiling (including pool boiling, flow boiling, and spray cooling) in the two-phase regime. An example of the broad range of heat flux that can be accommodated with the different modes and forms of direct liquid immersion cooling is shown in Fig. 11 [22].

Selection of a liquid for direct immersion cooling cannot be made on the basis of heat transfer characteristics alone. Chemical compatibility of the coolant with the chips and other packaging materials exposed to the liquid is an essential consideration. There may be several coolants that can provide adequate cooling, but only a few will be chemically compatible. Water is an example of a liquid which has very desirable heat transfer properties, but which is generally undesirable for direct immersion cooling because of its chemical and electrical characteristics. Alternatively, fluorocarbon liquids (e.g., FC-72, FC-86, FC-77, etc.) are generally considered to be the most suitable liquids for direct immersion cooling, in spite of their poorer thermophysical properties [22], [23].

1) Natural and Forced Liquid Convection: As in the case of air cooling, liquid natural convection is a heat transfer process in which mixing and fluid motion is induced by differences in coolant density caused by heat transferred to the coolant. As shown in Fig. 11, this mode of heat transfer offers the lowest heat flux or cooling capability for a given wall superheat or surface-to-liquid temperature difference. Nonetheless, the heat transfer rates attainable with liquid natural convection can ex- ceed those attainable with forced convection of air.

Higher heat transfer rates may be attained by utilizing a pump to provide forced circulation of the liquid coolant over the chip or module surfaces. This process is termed forced convection and the allowable heat flux for a given surface-to-liquid temper- ature difference can be increased by increasing the velocity of the liquid over the heated surface. The price to be paid for the increased cooling performance will be a higher pressure drop. This can mean a larger pump and higher system operating pres- sures. Although forced convection requires the use of a pump and the associated piping, it offers the opportunity to remove heat from high power chips and modules in a confined space. The liquid coolant may then be used to transport the heat to a remote heat exchanger to reject the heat to air or water.

Fig. 11. Heat flux ranges for direct liquid immersion cooling of microelectronic chips [22].

Fig. 12. Forced convection thermal resistance results for simulated 12.7 mm � 12.7 mm microelectronic chips (adapted from [24]).

Experimental studies were conducted by Incropera and Ramadhyani [24] to study liquid forced convection heat transfer from simulated microelectronic chips. Tests were performed with water and dielectric liquids (FC-77 and FC-72) flowing over bare heat sources and heat sources with pin-fin and finned pin extended surface enhancement. It can be seen in Fig. 12 that, depending upon surface and flow conditions (i.e., Reynolds number), thermal resistance values obtained for the fluorocarbon liquids ranged from 0.4 to 20 C W. It may be noted that a thermal resistance on the order of 0.5 C W could

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 573

support chip powers of 100 W while maintaining chip junction temperatures 85 C or less.

The Cray-2 supercomputer introduced in the mid-1980s pro- vides an example of the application of forced convection liquid cooling to computer electronics [25]. As shown in Fig. 13, the module assembly used in the Cray-2 was three-dimensional in structure consisting of eight interconnected printed circuit boards on which were mounted arrays of single-chip carriers. Module power dissipation was reported to be 600 to 700 W. Cooling was provided by FC-77 liquid distributed vertically between stacks of modules and flowing horizontally between the printed circuit cards.

Even higher heat transfer rates may be obtained in the forced convection mode by directing the liquid flow normal to the heated surface in the form of a liquid jet. A number of studies [26]–[28] have been conducted to demonstrate the cooling efficacy of liquid jet impingement flows. An example of the chip heat flux that can be accommodated using a single FC-72 liquid jet is shown in Fig. 14. Liquid jet impingement was the basic cooling scheme employed in the aborted SSI SS-1 super- computer. The cooling design provided for a maximum chip power of 40 W corresponding to a chip heat flux of 95 W/cm .

2) Pool and Flow Boiling: Boiling is a complex convec- tive heat transfer process depending upon liquid-to-vapor phase change with the formation of vapor bubbles at the heated sur- face. It may be characterized as either pool boiling (occurring in an essentially stagnant liquid) or flow boiling. The pool boiling heat flux, , usually follows a relationship of the form

where is a constant depending upon each fluid-surface combination, is the heat transfer surface area, is the temperature of the heated surface, and is the saturation temperature (i.e., boiling point) of the liquid. The value of the exponent is typically about 3. This means that as the heat flux is increased at the chip surface, the heat transfer coefficient or cooling effectiveness increases. For example if

and the power dissipation is doubled, the temperature rise will increase by only about 26% in the boiling mode compared to 100% in the forced convection mode.

A problem that has been associated with pool boiling of fluo- rocarbon liquids is that of temperature overshoot. This behavior is characterized by a delay in the inception of boiling on the heated surface. The heated surface continues to be cooled in the natural convection mode, with increased surface temperatures until a sufficient degree of superheat is reached for boiling to occur. This behavior is a result of the good wetting character- istics of fluorocarbon liquids and the smooth nature of silicon chips. Although much work [29] has been done in this area, it is still a potential problem in pool boiling applications using fluo- rocarbon liquids to cool untreated silicon chips.

The maximum chip heat flux that can be accommodated in pool boiling is determined by the critical heat flux. As power is increased more and more vapor bubbles are generated. Even- tually so many bubbles are generated that they form a vapor blanket over the surface preventing fresh liquid from reaching the surface and resulting in film boiling and high surface tem- peratures. Typical critical heat fluxes encountered in saturated

Fig. 13. Forced convection liquid-cooled Cray-2 electronic module assembly.

Fig. 14. Typical direct liquid jet impingement cooling performance for a 6.5 mm � 6.5 mm integrated circuit chip (adapted from [28]).

(i.e., liquid temperature saturation temperature) pool boiling of fluorocarbon liquids range from 10 to 15 W/cm , depending upon the nature of the surface (i.e., material, finish, geometry). The allowable critical heat flux may be extended by subcooling the liquid below its saturation temperature. For example experi- ments have shown that it is possible to increase the critical heat in pool boiling to as much as 25 W/cm by subcooling the liquid temperature to 25 C.

Higher critical heat fluxes may be achieved using flow boiling. For example, heat fluxes from 25 to 30 W/cm have been reported for liquid velocities of 0.5 to 2.5 m/s over the heated surface [30]. In addition, it may also be noted that temperature overshoot has not been observed to be a problem with flow boiling.

As in the case of air cooling or single phase liquid cooling, the heat flux that may be supported at the component level (i.e., chip or module) may be increased by attaching a heat sink to the surface. As part of an early investigation of pool boiling with fluorocarbon liquids a small 3-mm-tall molybdenum stud with a narrow slot (0.76 mm) down the middle was attached to

574 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

a 2.16 mm 2.16 mm silicon chip. A heat flux at the chip level in excess of 100 W/cm was achieved [31].

An example of a computer electronics package utilizing pool boiling to cool integrated circuit chips is provided by the IBM Liquid Encapsulated Module (LEM) developed in the 1970s [32]. As shown in Fig. 15, a substrate with 100 integrated circuit chips was mounted within a sealed module-cooling assembly containing a fluorocarbon coolant (FC-72). Boiling at the exposed chip surfaces provided a high heat transfer coefficient (1700 to 5700 W m -K) with which to meet chip cooling requirements. Either an air-cooled or water-cooled cold plate could be used to handle the module heat load. With this approach it was possible to cool 4.6 mm 4.6 mm chips dissipating 4 W and module powers up to 300 W.

3) Spray Cooling: In recent years spray cooling has re- ceived increasing attention as a means of supporting higher heat flux in electronic cooling applications. Spray cooling is a process in which very fine droplets of liquid are sprayed on the heated surface. Cooling of the surface is then achieved through a combination of thermal conduction through the liquid in contact with the surface and evaporation at the liquid–vapor interface.

One of the early investigations of spray cooling was con- ducted by Yao et al. [33] with both real and ideal sprays of FC-72 on a heated horizontal copper surface 3.65 cm in di- ameter. A peak heat flux of 32 W cm , or about 2 to 3 times the critical heat flux achievable with saturated pool boiling was reported.

Pautsch and Bar-Cohen [34] describe two methods of spray cooling suitable for electronic cooling. One method is termed “low density spray cooling” and is defined as occurring when the liquid contacts and wets the surface and then boils before interacting with the next impinging droplet. Although a very ef- ficient method of heat transfer, it does not support very high heat fluxes. The other method is termed “high density evapo- rative cooling” and requires spraying the liquid on the surface at a rate that maintains a continuously wetted surface. In the paper, experiments are described demonstrating the capability to accommodate heat fluxes in excess of 50 W/cm while main- taining chip junction temperatures below 85 C with spray evap- orative cooling. Spray evaporative cooling is used to maintain junction temperatures of ASICs on MCMs in the CRAY SV2 system between 70 C and 85 C for heat fluxes from 15 W/cm to 55 W/cm [35]. In addition to the CRAY cooling application, spray cooling has gained a foothold in the military sector pro- viding for improved thermal management, dense system pack- aging, and reduced weight [36].

Researchers have also investigated spray cooling heat transfer using other liquids. Lin and Ponnappan determined that critical heat fluxes can reach up to 90 W/cm with fluorocarbon liquids, 490 W/cm with methanol, and higher than 500 W/cm with water [37].

III. SYSTEM-LEVEL COOLING

Cooling systems for computers may be categorized as air-cooled, hybrid-cooled, liquid-cooled, or refrigera- tion-cooled. An air-cooled system is one in which air, usually in the forced convection mode, is used to directly cool and carry heat away from arrays of electronic modules and packages.

Fig. 15. IBM Liquid Encapsulated Module (LEM) cooling concept.

In some systems air-cooling alone may not be adequate due to heating of the cooling air as it passes through the machine. In such cases a hybrid-cooling design may be employed, with air used to cool the electronic packages and water-cooled heat exchangers used to cool the air. For even higher power packages it may be necessary to employ indirect liquid cooling. This is usually done utilizing water-cooled cold plates on which heat dissipating components are mounted, or which may be mounted to modules containing integrated circuit chips. Ultimately, direct liquid immersion cooling may be employed to accommodate high heat fluxes and a high system heat load.

A. Air-Cooled Systems

Forced air-cooled systems may be further subdivided into se- rial and parallel flow systems. In a serial flow system the same air stream passes over successive rows of modules or boards, so that each row is cooled by air that has been preheated by the previous row. Depending on the power dissipated and the air flow rate, serial air flow can result in a substantial air tempera- ture rise across the machine. The rise in cooling air temperature is directly reflected in increased circuit operating temperatures. This effect may be reduced by increasing the air flow rate. Of course to do this requires larger blowers to provide the higher flow rate and overcome the increase in air flow pressure drop.

Parallel air flow systems have been used to reduce the temper- ature rise in the cooling air [38], [39]. In systems of this type, the printed circuit boards or modules are all supplied air in parallel as shown in Fig. 16. Since each board or module is delivered its own fresh supply of cooling air, systems of this type typically require a higher total volumetric flow rate of air.

B. Hybrid Air–Water Cooling

An air-to-liquid hybrid cooling system offers a method to manage cooling air temperature in a system without resorting to a parallel configuration and higher air flow rates. In a system of this type, a water-cooled heat exchanger is placed in the heated air stream to extract heat and reduce the air temperature.

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 575

Fig. 16. Example of a parallel air-flow cooling scheme [40].

Fig. 17. Typical processor gate configuration with air-to-water heat exchanger between boards.

An example of the early use of this method was in the IBM System/360 Model 91 (c. 1964) [40]. As shown in Fig. 17, the cooling system incorporated an air-to-water finned tube heat exchanger between each successive row of circuit boards. The modules on the boards were still cooled by forced convection with air, however; the heated air exiting a board passed through an air-to-water heat exchanger before passing over the next board.

Approximately 50% of the heat transferred to air in the board columns was transferred to the cooling water. A comparison of cooling air temperatures in the board columns with and without hybrid air-to-water cooling is shown in Fig. 18. The reduction in air temperatures with air-to-water hybrid cooling resulted in

Fig. 18. Typical air temperature profiles across five high board columns with and without air-to-water heat exchangers between boards.

Fig. 19. Closed-loop liquid-to-air hybrid cooling system.

a one-to-one reduction in chip junction operating temperatures. Ultimately air-to-liquid hybrid cooling offers the potential for a sealed, recirculating, closed-cycle air-cooling system with total heat rejection of the heat load absorbed by the air to chilled water [39]. Sealing the system offers additional advantages. It allows the use of more powerful blowers to deliver higher air flow rates with little or no impact on acoustics. In addition, the potential for electromagnetic emissions from air inlet/outlet openings in the computer frame is eliminated.

Another variant of the hybrid cooling system is the liquid-to-air cooling system shown schematically in Fig. 19. In this system liquid is circulated in a sealed loop through a cold plate attached to an electronic module dissipating heat. The heat is then transported via the liquid stream to an air-cooled heat exchanger where it is rejected to ambient air. This scheme provides the performance advantages of indirect liquid cooling at the module level while retaining the advantages of air cooling at the system or box level. Most recently, a liquid-to-air cooling system is being used to cool the two processor modules in the Apple Power Mac G5 personal computer shipped earlier this year [42].

576 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

Fig. 20. Large scale computer configuration of the 1980s with coolant distribution unit (CDU).

C. Liquid-Cooling Systems

Either the air-to-water heat exchangers in a hybrid air–water-cooled system or the water-cooled cold plates in a conduction-cooled system rely upon a controlled source of water in terms of pressure, flow rate, temperature, and chem- istry. In order to insure the physical integrity, performance, and long-term reliability of the cooling system, customer water is usually not run directly through the water-carrying components in electronic frames. This is because of the great variability that can exist in the quality of water available at computer installations throughout the world. Instead a pumping and heat exchange unit, sometimes called a coolant distribution unit (CDU) is used to control and distribute system cooling water to computer electronics frames as shown in Fig. 20. The primary closed loop (i.e., system) is used to circulate cooling water to and from the electronics frames. The system heat load is transferred to the secondary loop (i.e., customer water) via a water-to-water heat exchanger in the CDU. Within an elec- tronics frame a combination of parallel-series flow networks is used to distribute water flow to individual cold plates and heat exchangers. An example of the piping configuration used to distribute water to cold plates mounted on multichip modules in the IBM 3081 processor is shown in Fig. 21.

As shown in Fig. 22, the basic flow and heat exchange com- ponents within a CDU consist of a heat exchanger, flow mixing valve, pumps, expansion tank, and water supply/return mani- folds. Water flow in the primary loop is provided at a fixed flow rate by a single operating pump, with a stand-by pump to pro- vide uninterrupted operation if the operating pump fails. The temperature of the water in the primary loop is controlled by using a mixing valve to regulate the fraction of the flow allowed to pass through the water-to-water heat exchanger and forcing the remainder to bypass the heat exchanger.

Fig. 21. Modular cold plate subsystem and water distribution loops in the IBM 3081 processor frame.

Fig. 22. Flow schematic of a typical IBM coolant distribution unit (CDU).

A CDU is also required for direct immersion cooling systems such as used in the CRAY-2 discussed earlier. In this application the CDU performs a similar role to that in water-cooled systems and segregates the chemical coolant (e.g., FC-77) from the cus- tomer water as shown in Fig. 23. Of course, all the materials within the CDU, as well as the piping distribution system must be chemically compatible with the coolant. In addition, because of the relatively high vapor pressure of the coolants suitable for direct immersion applications (e.g., fluorocarbons), the cooling system must be both “vapor-tight” and “liquid-tight” to ensure against any loss of the relatively expensive coolant.

D. Refrigeration Cooled Systems

The potential for enhancement of computer performance by operating at lower temperatures was recognized as long

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 577

Fig. 23. Cray-2 liquid immersion cooling system.

ago as the late 1960s and mid-1970s. Some of the earliest studies focused on Josephson devices operating at liquid he- lium temperatures (4 K). The focus then shifted to CMOS devices operating near liquid nitrogen temperatures (77 K). A number of researchers have identified the electrical advantages of operating electronics all the way down to liquid nitrogen LN temperatures (77 K) [43]–[45]. In summary, the ad-

vantages are:

• increased average carrier drift velocities (even at high fields);

• steeper sub-threshold slope, plus reduced sub-threshold currents (channel leakages) which provide higher noise margins;

• higher transconductance; • well-defined threshold voltage behavior; • no degradation of geometry effects; • enhanced electrical line conductivity; • allowable current density limits increase dramatically (i.e.,

electromigration concerns diminish). To illustrate how much improvement is realized with de-

creasing temperature, Fig. 24 shows the performance of a 0.1- m CMOS circuit (relative to the performance of a 0.1- m circuit designed to operate at 100 C) as a function of tem- perature [43]. The performance behavior is shown for three different assumptions about the threshold voltage. Only a slight performance gain is realized if the circuit unchanged from its design to operate at 100 C is taken down in temperature (same hardware). This is due to a rise in threshold voltage that partially offsets the gain due to higher mobilities. Tuning threshold voltages down until eventually the same off-current as the 100 C circuit is achieved yields the greatest performance gain to almost 2 at 123 K. In addition, the improvement in electrical conductivity with lowering temperature of the two metals used today to interconnect circuits on a chip [46].

Fig. 24. Relative performance factors (with respect to a 100 C value) of 1.5-V CMOS circuits as a function of temperature. Threshold voltages are adjusted differently with temperature in each of the three scenarios shown (adapted from [43]).

A conductivity improvement of approximately 1.5 , 2 , and 10 is realized at about 200 K, 123 K, and 77 K, respectively. The reduction in capacitive (RC) delays can therefore approach 2 at the lower (77 K) temperatures.

One of the earliest systems to incorporate refrigeration was the Cray-1 supercomputer announced in 1979 [47]. Its cooling system was designed to limit the IC die temperature to a max- imum of 65 C. The heat generated by the ICs was conducted through the IC package, into a PC board the IC packages were attached to, and then into a 2-mm-thick copper plate. The copper plate conducted heat to its edges which were in contact with cast aluminum cold bars. A refrigerant, Freon 22, flowed through stainless steel tubes embedded in the aluminum cold bars. The refrigerant, which was maintained at 18.5 C, absorbed the heat that was conducted into the aluminum cold bars. The refrigera- tion system ultimately rejected the heat to a cold water supply flowing at 40 gpm. The maximum heat load of the system was approximately 170 kW.

In the latter part of the 1980s, ETA Systems Inc. devel- oped a commercial supercomputer system using CMOS logic chips operating in liquid nitrogen [48]. The processor mod- ules were immersed in a pool of liquid nitrogen maintained in a vacuum-jacketed cryostat vessel within the CPU cabinet (Fig. 25). Processor circuits were maintained below 90 K. At this temperature, circuit speed was reported to be almost double that obtained at above ambient temperatures. Heat transfer ex- periments were conducted to validate peak nucleate boiling heat flux limits of approximately 12 W/cm . A closed-loop Stirling refrigeration system (cryogenerator) was developed to recondense the gaseous nitrogen produced by the boiling process.

In 1991, IBM initiated an effort to demonstrate the feasibility of packaging and cooling a CMOS processor in a form suitable for product use [49]. A major part of the effort was devoted to the development of a refrigeration system that would meet

578 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

Fig. 25. ETA-10 cryogenic system configuration [48].

IBM’s reliability and life expectancy specifications and handle a cooling load of 250 W at 77 K. A Stirling cycle type refrigerator was chosen as the only practical refrigeration method for obtaining liquid nitrogen temperatures. Prototype models were built with cooling capacities of 500 and 250 W at 77 K. In addition, a packaging scheme had to be developed that would withstand cycling from room temperature down to 77 K and provide thermal insulation to reduce the parasitic heat losses. A low-temperature conduction module (LTCM) was built to package the chip and module. The LTCM, or cryostat, consisted of a stainless steel housing with a vacuum to minimize heat losses. This hardware was used to measure chip performance at 77 K. As a result of this effort, prototype Stirling cycle cryocoolers in a form factor compatible with overall system packaging constraints were built and successfully tested and key elements of the packaging concept were demonstrated.

IBM’s most recent interest in refrigeration-cooling focused on the application of conventional vapor compression refrigeration technology to operate below room temperature conditions, but well above cryogenic temperatures. In 1997, IBM developed, built and shipped its first refrigeration-cooled server (the S/390 G4 system) [50], [51]. This cooling scheme provided an average processor temperature of 40 C which represented a temperature decrease of 35 C below that of a comparable air-cooled system. The system packaging layout is shown in Fig. 26. Below the

bulk power compartment is the central electronic complex (CEC) where the MCM housing 12 processors is located. Two modular refrigeration units (MRUs) located near the middle of the frame provide cooling via the evaporator attached to the back of the processor module. Only one MRU is operated at a time during normal operation. The evaporator mounted on the processor module is fully redundant with two independent refrigerated passages. Refrigerant passing through one passage is adequate to cool the MCM which dissipates a maximum power of 1050 W. Following the success of this machine IBM has continued to exploit the advantages of sub-ambient cooling at the high-end of its zSeries product line.

In 1999, Fujitsu released its Global Server GS8900 that uti- lized a refrigeration unit to chill a secondary coolant and then supply the coolant to a liquid-cooled Central Processor Unit (CPU) MCMs [52]. A schematic of the liquid-cooled system is shown in Fig. 27. The refrigeration unit which is called the chilled coolant supply unit (CCSU) contains three air-cooled re- frigeration modules and two liquid circulating pumps. The re- frigeration modules chill the coolant to near 0 C. The system board assembly housing the CPU modules is accommodated in a closed box in which the dew point is controlled in order to pre- vent condensation from forming on the electrical equipment. In comparison to an air-cooled version of this system, circuit junc- tion temperatures are reduced by more than 50 C.

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 579

Fig. 26. IBM S390 G4 server with refrigeration-cooled processor module and redundant modular refrigeration units (MRUs).

Fig. 27. Configuration of Fujitsu’s GS8900 low-temperature liquid cooling system (adapted from [52]).

IV. DATA CENTER THERMAL MANAGEMENT

Due to technology compaction, the information technology (IT) industry has seen a large decrease in the floor space required to achieve a constant quantity of computing and storage capability. However, the energy efficiency of the equipment has not dropped at the same rate. This has resulted in a significant increase in power density and heat dissipation within the footprint of computer and telecommunications hardware. The heat dissipated in these systems is exhausted to the room and the room has to be maintained at acceptable temperatures for reliable operation of the equipment. Cooling computer and telecommunications equipment rooms is becoming a major challenge.

The increasing heat load of datacom equipment has been documented by a thermal management consortium of 17 com- panies and published in collaboration with the Uptime Institute [53] as shown in Fig. 28. Also shown in this figure are mea- sured heat fluxes (based on product footprint) of some recent product announcements. The most recent shows a rack dissi- pating 28 500 W resulting in a heat flux based on the footprint of the rack of 20 900 W/m . With these heat loads the focus for customers of such equipment is in providing adequate air flow at a temperature that meets the manufacturer’s require- ments. Of course, this is a very complex problem considering the dynamics of a data center and one that is only starting to be addressed [54]–[61]. There are many opportunities for improving the thermal environment of data centers and the

580 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

Fig. 28. Equipment power trends [53].

Fig. 29. Cluster of server racks.

efficiency of the cooling techniques applied to those data cen- ters [61]–[63].

Air-flow direction in the room has a major affect on the cooling of computer rooms. A major requirement is the uni- formity of air temperature at the computer inlets. A number of papers have focused on whether the air should be deliv- ered overhead or from underneath a raised floor [65]–[67], ceiling height requirements to eliminate “heat traps” or hot air stratification [64], [65], raised floor heights [64], and proper dis- tribution of the computer equipment in the data center [66], [68] to eliminate the potential for hot spots or high temperatures. Computer room cooling concepts can be classified according to the two main types of room construction: 1) nonraised floor (or standard room) and 2) raised floor. Some of the papers discuss and compare these concepts in general terms [67], [69]–[71].

Data centers are typically arranged into hot and cold aisles as shown in Fig. 29. This arrangement accommodates most rack designs which typically employ front-to-back cooling and

somewhat separates the cold air exiting the perforated tiles (for raised floor designs) and overhead chilled air flow (for nonraised floor designs) from the hot air exhausting from the back of the racks. The racks are positioned on the cold aisle such that the fronts of the racks face the cold aisle. Similarly, the back of the racks face each other and provide a hot-air exhaust region. This layout allows the chilled air to wash the front of the data processing (DP) equipment while the hot air from the racks exits into the hot aisle as it returns to the inlet of the air conditioning (A/C) units.

With the arrangement of computer server racks in rows within a data center there may be zones where all the equipment within that zone dissipates very high heat loads. This arrangement of equipment may be required in order to achieve the performance desired by the customer. These high-performance zones (shown in Fig. 30) can provide significant challenges in maintaining an environment within the manufacturer’s specifications. Fig. 31 shows trends for these high heat flux zones using the equipment power trends showing in Fig. 28. In contrast, a data center that employs a mix of computer equipment employing lower power racks is also shown in Fig. 31.

A. Room Air Flow Designs

Air flow distribution within a data center has a major effect on the thermal environment of the data processing equipment lo- cated within these rooms. A key requirement of manufacturers is that the inlet temperature and humidity to the electronic equip- ment be maintained within the specifications. Customers of such equipment typically employ two types of air distribution sys- tems to provide this environment. These are briefly described below.

1) Non-Raised Floor Room Cooling: Cooling air can be supplied from the ceiling in the center of the room, where com- puters are located, with exhausts located near the walls. Short partitions are installed around the supply opening to minimize short circuiting of supply air to returns. Similarly cool air from

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 581

Fig. 30. Data center management focus areas.

Fig. 31. Zonal heat fluxes for commercial and high-performance computing.

a more distributed area of the ceiling can be supplied with exhaust located around the perimeter or a return in the floor. Alternatively a design employed by the telecommunications industry and more recently employed in the computer industry utilizes heat exchangers located above the racks near the ceiling. The racks are arranged using the hot and cold aisle concept where hot air from hot aisles enter the heat exchangers and once cooled in the heat exchanger is forced down into the cold aisles using fans mounted at the bottom of heat exchangers.

2) Raised Floor Room Cooling: Computers typically have a large number of cables connecting the components within a rack and between racks. To maintain a neat layout, a raised floor (also known as false floor or double floor) is used and all interconnect cabling is located under the raised floor. In many cases this space under the raised floor can be used as an air supply plenum with the use of perforated tiles exhausting chilled air. Similarly, it is possible to have a false ceiling (also called dropped ceiling) in the room with the space above the false ceiling used as the air supply or the return plenum. The air flow can be from floor to

ceiling, ceiling to floor, floor to exhausts located in the walls or other locations in the room.

B. Factors Influencing Rack Inlet Temperatures

The primary thermal management focus for data centers is that the temperature and humidity requirements for the elec- tronic equipment housed within the data center are met. For example, one large computer manufacturer has a 42U (1U = 44.45 mm) tall rack configured for front-to-back air cooling and requires that the inlet air temperature into the front of the rack be maintained between 10 and 32 C for elevations up to 1295 m (4250 feet). Higher elevations require a derating of the max- imum dry bulb temperature of 1 C for every 219 m (720 feet) above 1295 m (4250 feet) up to 3048 m (10000 feet). These temperature requirements are to be maintained over the entire front of the 2 m height of the rack where air is drawn into the system. Fig. 30 shows an account with 49 of these racks each dissipating from 7 to 8 kW. Since air enters the front of each rack over the entire height of the rack it is a challenge to main- tain the temperature within the requirements as stated above for all the racks within the data center. Although the inlet air tem- peratures for all the racks met the requirements there were mod- ifications required after the installation in order that the require- ments be met. Herein lays the challenge to data center facility operators, especially with the increased equipment heat loads as shown in Fig. 28. How do operators maintain these environ- mental requirements for all the racks situated within the data center and in a data center where the equipment is constantly changing? Without proper attention to the design of the facili- ties in providing proper airflow and rack inlet air temperatures hot spots within the data center can occur.

Besides the power density of the equipment in the data center increasing significantly, there are other factors that influence data center thermal management. Managers of IT equipment

582 IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, VOL. 4, NO. 4, DECEMBER 2004

need to deploy equipment quickly in order to get maximum use of a large financial asset. This may mean that minimal time is spent on site preparation, thereby potentially resulting in thermal issues once the equipment is installed.

The construction cost of a data center is now exceeding $1000 per square foot in some metropolitan areas and the annual oper- ating cost is $50 to $150 per square foot. For these reasons, IT and facilities managers want to obtain the most out of their data center space and maximize the utilization of their infrastructure. Unfortunately, the current situation in many data centers does not permit this optimization. The equipment installed into a data center can be from many different manufacturers each having a different environmental specification. With these requirement the IT facilities manager is required to overcool his data center to compensate for the equipment with the tightest requirements.

C. Need for Thermal Guidelines

Since many of the data center thermal management issues are industry-wide, a number of equipment manufacturers decided to form a consortium in 1998 to address common issues related to thermal management of data centers and telecommunications rooms. Initial interest was expressed from the following compa- nies: Amdahl, Cisco Systems, Compaq, Cray, Inc., Dell Com- puter, EMC, HP, IBM, Intel, Lucent Technologies, Motorola, Nokia, Nortel Networks, Sun Microsystems, and Unisys. As a result the Thermal Management Consortium for Data Centers and Telecommunications Rooms was formed. Since the industry was facing increasing power trends, it was decided that the first priority was to develop and then publish (in collaboration with Uptime Institute) a trend chart on power density of the industry’s equipment that would aid customers in planning data centers for the future (see Fig. 28).

In January 2002, the American Society of Heating, Re- frigerating and Air Conditioning Engineers (ASHRAE) was approached with a proposal to create an independent committee to specifically address high-density electronic heat loads. The proposal was accepted by ASHRAE and eventually a tech- nical committee, TC9.9 Mission Critical Facilities, Technology Spaces, and Electronic Equipment, was formed. The first pri- ority of TC9.9 was to create a Thermal Guidelines document that would help to align the designs of equipment manufac- turers and help data center facility designers to create efficient and fault tolerant operation within the data center. The re- sulting document, Thermal Guidelines for Data Processing Environments, was published in January 2004 [73]. Some of the key issues of that document will now be described.

For data centers, the primary thermal management focus is on assuring that the housed equipment’s temperature and hu- midity requirements are met. Each manufacturer has their own environmental specification and a customer of many types of electronic equipment is faced with a wide variety of environ- mental specifications. In an effort to standardize, the ASHRAE TC9.9 committee first surveyed the environmental specifica- tions of a number of data processing equipment manufacturers. From this survey, four classes were identified that would en- compass most of the specifications. Also included within the guidelines was a comparison to the NEBS (Network Equipment Building Systems) specifications for the telecommunications

industry to show both the differences and also aid in possible convergence of the specifications in the future. The four data processing classes cover the entire environmental range from air conditioned, server and storage environments of classes 1 and 2 to the lesser controlled environments like class 3 for workstations, PCs and portables or class 4 for point of sales equipment with virtually no environmental control.

In order for seamless integration between the server and the data center to occur, certain protocols need to be developed especially in the area of airflow. This section provides airflow guidelines for both the IT/Facility managers and the equip- ment manufacturers to design systems that are compatible and minimize inefficiencies. Currently, manufacturers design their equipment exhaust and inlets wherever it is convenient from an architectural standpoint. As a result, there have been many cases where the inlet of one server is directly next to the exhaust of adjacent equipment resulting in the ingestion of hot air. This has direct consequences to the reliability of that machine. This guideline attempts to steer manufacturers toward a common airflow scheme to prevent this hot air ingestion by specifying regions for inlets and exhausts. The guideline recommends one of the three airflow configurations: front-to-rear, front-to-top and front-to-top-and-rear.

Once manufacturers start implementing the equipment pro- tocol, it will become easier for facility managers to optimize their layouts to provide maximum possible density by following the hot-aisle/cold-aisle concept as shown in Fig. 30. In other words, the front face of all equipment is always facing the cold aisle.

The ASHRAE guideline’s heat and airflow reporting sec- tion defines what information is to be reported by the infor- mation technology equipment manufacturer to assist the data center planner in the thermal management of the data center. The equipment heat release value is the key parameter that is reported. In addition several other pieces of information are re- quired if the heat release values are to be meaningful like total system air flow rate, typical configurations of system, air flow direction of system, and class environment, just to mention a few.

Other publications will follow on data center thermal man- agement with one planned for January 2005 that will update the initial trend chart and will discuss air cooling and water cooling in the context of the data center. However, to aid in the ad- vancement of data center thermal management it is of utmost importance to understand the current situation in high density data centers in order to build on this understanding to further enhance the thermal environment in data centers. In this effort Schmidt [74] published the first paper of its kind to completely thermally profile a high density data center. The motivation for the paper was twofold. First, the paper provided some basic in- formation on the thermal/flow data collected from a high density data center. Second, it provided a methodology which others can follow in collecting thermal and air flow data from data centers so that data can be assimilated to make comparisons. This data- base can then provide the basis for future data center air cooling design and aid in the understanding of deployment of racks of higher heat loads in the future. This data needs to be further expanded so that data center design and optimization from an air-cooled viewpoint can occur.

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 583

Data centers do have limitations and each data center is unique such that some data centers have much lower power density limitations than others. To resolve these environmental issues in some data centers today manufacturers of HVAC equipment have begun to offer liquid cooling solutions to aid in data center thermal management. The objective of these new approaches is to move the liquid cooling closer to the source of the problem, which is the electronic equipment that is producing the heat. Placing the cooling near the source of heat shortens the distance that air must be moved and results in minimal static pressure. This increases the capacity, flexibility, efficiency, and scalability of the cooling solutions. Several viable options based on this strategy have been developed: 1) rear-mounted fin and tube heat exchangers; 2) internal fin and tube heat exchangers either at the bottom of a rack of electronic equipment or mounted to the side of a rack; and 3) overhead fin and tube heat exchangers. Although each one of these is a liquid-cooled solution adjacent to the air-cooled rack, the liquid can be either water based or refrigerant based. These solutions and others will continue to be promoted with the increased power densities being shipped and the projections of the increased heat loads by the manufacturers of datacom equipment.

V. FUTURE CHALLENGES

For many years the major challenge facing thermal engineers has been how to limit chip operating temperatures in the face of increases in heat flux with each new generation of chip de- sign. This challenge may be expected to continue through the remainder of this decade. As the size of semiconductor devices is reduced further, leakage power dissipation may become com- parable to or even greater than the active device power dissipa- tion further compounding the thermal challenge.

In the previous sections the cooling technologies and designs developed to respond to increased powers were discussed with no mention of cost. Although controlling and reducing cost has always been an objective, the overriding consideration was to provide the necessary cooling even if the cost was higher than desired. Today things are considerably different with intense competition demanding increased performance at reduced cost. While the focus remains on providing the necessary cooling, it is no longer acceptable to do so at any cost. The cost of cooling must be commensurate with the overall manufacturing cost of the computer and indeed be a relatively small fraction of the total cost!

Although air cooling may be expected to continue to be the most pervasive method of cooling, in many instances the chips and packages that require cooling are at or will soon exceed the limits of air cooling. As this happens it will be necessary to once again introduce water or some other form of liquid cooling. This represents a real challenge as it does not mean simply res- urrecting the water-cooled designs of the past. Machines today are packaged much more densely than in the past making the job of introducing water or any other form of liquid cooling much more challenging. In addition, today many machines must virtu- ally operate continuously without interruption. This means that the cooling design must incorporate redundancy to allow for a

blower or pump failure while continuing to provide the required cooling function. It also means that provisions must be incorpo- rated in the cooling design to allow replacement of the failed unit while the machine continues to operate. All of these con- siderations clearly represent an increased level of challenges for thermal engineers. It also means that thermal engineers must be an integral part of the design process from the very beginning and work very closely with electrical and packaging engineers to achieve a truly holistic design.

In addition, as identified in the thermal management section of the 2002 National Electronics Management Technology Roadmap [75] there are several major cooling areas requiring further development and innovation. In order to diffuse high heat flux from chip heat sources and reduce thermal resistance at the chip-to-sink interface, there is a need to develop low cost, higher thermal conductivity, packaging materials such as adhe- sives, thermal pastes and thermal spreaders. Advanced cooling technology in the form of heat pipes and vapor chambers are already widely used. Further advances in these technologies as well as thermoelectric cooling technology, direct liquid cooling technology, high-performance air-cooled heat sinks and air movers are also needed. Also as discussed earlier in the paper, cooling at the data center level is also becoming a very challenging problem. High performance cooling systems that will minimize the impact to the environment within the customer’s facility are needed to answer this challenge. Finally, to achieve the holistic design referred to above, it will be necessary to develop advanced modeling tools to integrate the electrical, thermal, and mechanical aspects of package and product function, while providing enhanced usability and minimizing interface incompatibilities.

It is clear that thermal management for high-performance computers will continue to be an area offering engineers many challenges and opportunities for meaningful contributions and innovations.

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[38] C. Hilbert, S. Sommerfeldt, O. Gupta, and D. J. Herrell, “High perfor- mance air cooled heat sinks for integrated circuits,” IEEE Trans. CHMT, vol. 13, no. 4, pp. 1022–1031, 1990.

[39] R. C. Chu, R. E. Simons, and K. P. Moran, “System cooling design con- siderations for large mainframe computers,” in Cooling Techniques for Computers, W. Aung, Ed. New York: Hemisphere, 1991.

[40] V. W. Antonetti, R. C. Chu, and J. H. Seely, “Thermal design for IBM system/360 model 91,” presented at the 8th Int. Electronic Circuit Pack- aging Symp., San Francisco, CA, 1967.

[41] R. C. Chu, M. J. Ellsworth, E. Furey, R. R. Schmidt, and R. E. Simons, “Method and apparatus for combined air and liquid cooling of stacked electronic components,” U.S. Patent 6,775,137 B2, Aug. 10, 2004.

[42] H. Bray, “Computer Makers Sweat Over Cooling,” The Boston Globe, 2004.

[43] Y. Taur and J. Nowak, “CMOS devices below 0.1 �m How high will performance go ?,” in Int. Electron Devices Meeting Tech. Dig., 1997, pp. 215–218.

[44] K. Rose, R. Mangaser, C. Mark, and E. Sayre, “Cryogenically cooled CMOS,” Critical Rev. Solid State Materials Sci., vol. 4, no. 1, pp. 63–99, 1999.

[45] W. F. Clark, E. Badih, and R. G. Pires, “Low temperature CMOS—A brief review,” IEEE Trans. Compon., Hybrids, Manufact. Technol., vol. 15, no. 3, pp. 397–404, Jun. 1992.

[46] R. F. Barron, Cryogenic Systems, 2nd ed. New York: Oxford Univ. Press, 1985.

[47] J. S. Kolodzey, “Cray-1 computer technology,” IEEE Trans. Compon., Hybrids, Manufact. Technol., vol. CHMT-4, no. 2, pp. 181–186, Jun. 1981.

[48] D. M. Carlson, D. C. Sullivan, R. E. Bach, and D. R. Resnick, “The ETA-10 liquid-nitrogen-cooled supercomputer system,” IEEE Trans. Electron. Devices, vol. 36, no. 8, pp. 1404–1413, Aug. 1989.

[49] R. E. Schwall and W. S. Harris, “Packaging and cooling of low temper- ature electronics,” in Advances in Cryogenic Engineering. New York: Plenum Press, 1991, pp. 587–596.

[50] R. R. Schmidt, “Low temperature electronics cooling,” Electronics Cooling, vol. 6, no. 3, Sep. 2000.

[51] R. R. Schmidt and B. Notohardjono, “High-End server low temperature cooling,” IBM J. Res. Develop., vol. 46, no. 2, pp. 739–751, 2002.

[52] A. Fujisaki, M. Suzuki, and H. Yamamoto, “Packaging technology for high performance CMOS server fujitsu GS8900,” IEEE Trans. Adv. Packag., vol. 24, pp. 464–469, Nov. 2001.

[53] Heat Density Trends in Data Processing, Computer Systems and Telecommunication Equipment. Santa Fe, NM: Uptime Institute, 2000.

[54] R. Schmidt, “Effect of data center characteristics on data processing equipment inlet temperatures,” in Proc. IPACK ’01, Advances in Electronic Packaging 2001, vol. 2, Kauai, HI, Jul. 2001, pp. 1097–1106.

[55] R. Schmidt and E. Cruz, “Raised floor computer data center: Effect on rack inlet temperatures of chilled air exiting both the hot and cold aisles,” in Proc. ITHERM, San Diego, CA, Jun. 2002, pp. 580–594.

[56] , “Raised floor computer data center: Effect on rack inlet tempera- tures when rack flow rates are reduced,” presented at the Int. Electronic Packaging Conf. and Exhibition, Maui, HI, Jul. 2003.

[57] , “Raised floor computer data center: Effect on rack inlet tempera- tures when adjacent racks are removed,” presented at the Int. Electronic Packaging Conf. and Exhibition, Maui, HI, July 2003.

[58] , “Raised floor computer data center: Effect on rack inlet temper- atures when high powered racks are situated amongst lower powered racks,” presented at the ASME IMECE Conf., New Orleans, LA, Nov. 2002.

CHU et al.: REVIEW OF COOLING TECHNOLOGIES FOR COMPUTER PRODUCTS 585

[59] , “Clusters of high powered racks within a raised floor computer data center: Effect of perforated tile flow distribution on rack inlet air temperatures,” presented at the ASME IMECE Conf., Washington, DC, Nov. 2003.

[60] C. Patel, C. Bash, C. Belady, L. Stahl, and D. Sullivan, “Computational fluid dynamics modeling of high compute density data centers to assure system inlet air specifications,” in Proc. IPACK ’01, Advances in Elec- tronic Packaging 2001, vol. 2, Kauai, HI, July 2001, pp. 821–829.

[61] C. Patel, R. Sharma, C. Bash, and A. Beitelmal, “Thermal considerations in cooling large scale compute density data centers,” in Proc. ITHERM, San Diego, CA, Jun. 2002, pp. 767–776.

[62] C. Patel, C. Bash, R. Sharma, M. Beitelmal, and R. Friedrich, “Smart cooling of data centers,” in Proc. IPACK ’03, Advances in Electronic Packaging 2003, Maui, HI, Jul. 2003, pp. 129–137.

[63] C. Bash, C. Patel, and R. Sharma, “Efficient thermal management of data centers—Immediate and long term research needs,” HVAC&R Res. J., vol. 9, no. 2, pp. 137–152, Apr. 2003.

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[67] R. W. Goes, “Design electronic data processing installations for relia- bility,” Heating, Piping Air Cond., vol. 31, no. 9, pp. 118–120, Sept. 1959.

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[73] Thermal Guidelines for Data Processing Environments. Atlanta, GA: ASHRAE, 2004.

[74] R. Schmidt, “Thermal profile of a high density data center-methodology to thermally characterize a data center,” presented at the ASHRAE Nashville Conf., Nashville, TN, May 2004.

[75] R. C. Chu and Y. Joshi, Eds., “Thermal Management,” in National Elec- tronics Manfacturing Technology Roadmaps. Herndon, VA: National Electronic Manufacturing Initiative, Inc., 2002.

Richard C. Chu has been an IBM Fellow since 1983. He is also a Fellow of ASME and AAAS. Since joining IBM’s Development Laboratory in Poughkeepsie, NY, in 1960, he has held a variety of technical and managerial assignments. His leadership and creativity in the area of thermal management of microelectronic equipment have earned him numerous awards and increasing re- sponsibilities. He invented/co-invented the Modular Conduction Cooling System and the Thermal Con- duction Module (TCM) cooling concept, which

was the primary cooling solution for IBM’s high performance computers for many years. He has been recognized by IBM as a master inventor with over 100 issued patents and over 150 patent disclosure publications. He has also published two co-authored books on the subject of thermal management of microelectronics.

Dr. Chu is the recipient of 38 IBM Invention Achievement Awards, 4 IBM Outstanding Innovation Awards, and an IBM Corporate Award. Among his many other honors, he is a past president of the IBM Academy of Technology, an elected member of the National Academy of Engineering, a member of the Academia Sinica, and a Distinguished Alumni of both his alma maters, Purdue University and National Cheng-Kung University in Taiwan. Most recently, he was the recipient of the 2003 InterPACK Conference Achievement Award.

Robert E. Simons received the B.S. degree in mechanical engineering from Widener University, Chester, PA, and the M.S. degree in operations research and applied statistics from Union College, Schenectady, NY.

Prior to retiring from IBM in 1995, he was a Senior Technical Staff Member and manager in the Advanced Thermal Laboratory at the IBM Devel- opment Laboratory, Poughkeepsie, NY. He joined IBM in 1966 working in the thermal area as an engineer and manager, and was a key participant in

the thermal design and development of cooling technologies for the IBM 3033, 3081, and 3090 computer systems, as well as the development of direct liquid immersion cooling techniques. As a co-inventor of the cooling scheme for the IBM Thermal Conduction Module (TCM), he received an IBM Outstanding Innovation Award and a Corporate Award. While at IBM, he was a member of the IBM Academy of Technology. He is an inventor on over 50 issued U.S. patents and 75 invention publications. He has published over 50 papers and book chapters related to cooling electronic packages and systems, and developed a short course on electronics cooling that he taught in the U.S. and Europe.

Mr. Simons is a recipient of the Semi-Therm Significant Contributor Award and has been active in the conference since its inception serving in the capacities of session, program and general chairman. He is also a past chairman of the ASME Heat Transfer Division K-16 Committee on Heat Transfer in Electronic Equipment.

Michael J. Ellsworth received the B.E.M.E. in 1984 and the M.E.M.E. degree in 1988 from Manhattan College, Riverdale, NY.

He is a Senior Technical Staff Member working in the Advanced Thermal Laboratory in Poughkeepsie, NY, and has been with IBM since 1988. While at IBM he has explored improved cooling for applica- tions ranging from laptops to high-end servers and has investigated cooling technologies encompassing air, water, and refrigeration. From 1992 to 1996 he was a ceramic/thin film package applications engi-

neer and technical program manager in the Interconnect Products Group, East Fishkill, NY. He is a member of IEEE and of ASME where he serves on the Electronics and Photonics Packaging Division Executive Committee and on the K-16 Committee on Heat Transfer in Electronic Equipment. He has published 15 technical papers and holds 33 U.S. patents.

Roger R. Schmidt has over 25 years experience in engineering and engineering management in the thermal design of IBM’s large scale computers. He has led development teams in cooling mainframes, client/servers, parallel processors and test equip- ment utilizing such cooling mediums as air, water, and refrigerants. He has published more than 60 technical papers and holds 44 patents in the area of electronic cooling. He is a member of ASME’s Heat Transfer Division and an active member of the K-16 Electronic Cooling Committee. He has

been an Associate Editor of the Journal of Electronic Packaging. He has taught extensively over the past 20 years Mechanical Engineering courses for prospective Professional Engineers and has given seminars on electronic cooling at a number of universities.

Dr. Schmidt is a Distinguished Engineer, IBM Academy of Technology Member, and a ASME Fellow.

Vincent Cozzolino holds degrees in electrical engi- neering and physics.

He joined IBM in November, 1977. After holding various technical positions, he became a Manager in 1982. He has held management positions in manu- facturing and development and managed employees worldwide. He is currently the Vice President of Product and Quality Engineering.

  • toc
    • Review of Cooling Technologies for Computer Products
    • Richard C. Chu, Robert E. Simons, Michael J. Ellsworth, Roger R.
      • I. I NTRODUCTION
    • Fig.€1. Evolution of module level heat flux in high-end computer
      • II. M ODULE -L EVEL C OOLING
        • A. Internal Module Cooling
    • Fig.€2. Cross-section of a typical module denoting internal cool
    • Fig.€3. Isometric cutaway view of an IBM TCM module with a water
    • Fig.€4. Cross-sectional view of an IBM TCM module on an individu
    • Fig.€5. Cross-sectional view of a Hitachi M-880 module on an ind
      • B. External Module Cooling
    • Fig.€6. Cross-sectional view of central processor module package
    • Fig.€7. MCM cross-section showing heat spreader adhesively attac
      • 1) Air-Cooled Heat Sinks: A typical air-cooled heat sink is show
    • Fig.€8. Typical air-cooled heat sink.
    • Fig.€9. Typical (a) straight fin heat sink and (b) pin fin heat
    • Fig.€10. Air flow path through a heat sink: (a) cross flow or (b
      • 2) Water-Cooled Cold Plates: For situations where air cooling co
      • C. Immersion Cooling
        • 1) Natural and Forced Liquid Convection: As in the case of air c
    • Fig.€11. Heat flux ranges for direct liquid immersion cooling of
    • Fig.€12. Forced convection thermal resistance results for simula
      • 2) Pool and Flow Boiling: Boiling is a complex convective heat t
    • Fig.€13. Forced convection liquid-cooled Cray-2 electronic modul
    • Fig.€14. Typical direct liquid jet impingement cooling performan
      • 3) Spray Cooling: In recent years spray cooling has received inc
      • III. S YSTEM -L EVEL C OOLING
    • Fig.€15. IBM Liquid Encapsulated Module (LEM) cooling concept.
      • A. Air-Cooled Systems
      • B. Hybrid Air Water Cooling
    • Fig.€16. Example of a parallel air-flow cooling scheme [ 40 ] .
    • Fig.€17. Typical processor gate configuration with air-to-water
    • Fig.€18. Typical air temperature profiles across five high board
    • Fig.€19. Closed-loop liquid-to-air hybrid cooling system.
      • Fig.€20. Large scale computer configuration of the 1980s with co
      • C. Liquid-Cooling Systems
    • Fig.€21. Modular cold plate subsystem and water distribution loo
    • Fig.€22. Flow schematic of a typical IBM coolant distribution un
      • D. Refrigeration Cooled Systems
    • Fig.€23. Cray-2 liquid immersion cooling system.
    • Fig.€24. Relative performance factors (with respect to a 100 $\,
    • Fig.€25. ETA-10 cryogenic system configuration [ 48 ] .
    • Fig.€26. IBM S390 G4 server with refrigeration-cooled processor
    • Fig.€27. Configuration of Fujitsu's GS8900 low-temperature liqui
      • IV. D ATA C ENTER T HERMAL M ANAGEMENT
    • Fig.€28. Equipment power trends [ 53 ] .
    • Fig.€29. Cluster of server racks.
      • A. Room Air Flow Designs
        • 1) Non-Raised Floor Room Cooling: Cooling air can be supplied fr
    • Fig.€30. Data center management focus areas.
    • Fig.€31. Zonal heat fluxes for commercial and high-performance c
      • 2) Raised Floor Room Cooling: Computers typically have a large n
      • B. Factors Influencing Rack Inlet Temperatures
      • C. Need for Thermal Guidelines
      • V. F UTURE C HALLENGES
      • A. E. Bergles, The evolution of cooling technology for electrica
      • D. Hanson, The New Alchemists . New York: Avon Books, 1982.
      • R. C. Chu, U. P. Hwang, and R. E. Simons, Conduction cooling for
      • R. C. Chu, O. R. Gupta, U. P. Hwang, and R. E. Simons, Gas encap
      • R. C. Chu and R. E. Simons, Cooling technology for high performa
      • G. F. Goth, M. L. Zumbrunnen, and K. P. Moran, Dual-Tapered pist
      • F. Kobayashi, Y. Watanabe, M. Yamamoto, A. Anzai, A. Takahashi,
      • F. Kobayashi, Y. Watanabe, K. Kasai, K. Koide, K. Nakanishi, and
      • P. Singh, D. Becker, V. Cozzolino, M. Ellsworth, R. Schmidt, and
      • J. U. Knickerbocker, An advanced multichip module (MCM) for high
      • D. J. De Kock and J. A. Visser, Optimal heat sink design using m
      • J. R. Culham and Y. S. Muzychka, Optimization of plate fin heat
      • M. F. Holahan, Fins, fans, and form: Volumetric limits to air-si
      • F. Roknaldin and R. A. Sahan, Cooling solution for next generati
      • M. Gao and Y. Cao, Flat and U-shaped heat spreaders for high-pow
      • Z. Z. Yu and T. Harvey, Precision-Engineered heat pipe for cooli
      • V. W. Antonetti, S. Oktay, and R. E. Simons, Heat transfer in el
      • R. S. Prasher, C. Simmons, and G. Solbrekken, Thermal contact re
      • D. J. Delia, T. C. Gilgert, N. H. Graham, U. P. Hwang, P. W. Ing
      • D. B. Tuckerman and R. F. Pease, High performance heat sinking f
      • R. Hahn, A. Kamp, A. Ginolas, M. Schmidt, J. Wolf, V. Glaw, M. T
      • A. E. Bergles and A. Bar-Cohen, Direct liquid cooling of microel
      • R. E. Simons, Direct liquid immersion cooling for high power den
      • F. P. Incropera, Liquid immersion cooling of electronic componen
      • R. D. Danielson, N. Krajewski, and J. Brost, Cooling a superfast
      • L. Jiji and Z. Dagan, Experimental investigation of single phase
      • P. F. Sullivan, S. Ramadhyani, and F. P. Incropera, Extended sur
      • G. M. Chrysler, R. C. Chu, and R. E. Simons, Jet impingement boi
      • A. E. Bergles and A. Bar-Cohen, Immersion cooling of digital com
      • I. Mudawar and D. E. Maddox, Critical heat flux in subcooled flo
      • R. C. Chu and R. E. Simons, Review of boiling heat transfer for
      • R. E. Simons, The evolution of IBM high performance cooling tech
      • S. C. Yao, S. Deb, and N. Hammouda, Impacting spray boiling for
      • G. Pautsch and A. Bar-Cohen, Thermal management of multichip mod
      • G. Pautsch, An overview on the system packaging of the Cray SV2
      • T. Cader and D. Tilton, Implementing spray cooling thermal manag
      • G. Lin and R. Ponnappan, Heat transfer characteristics of spray
      • C. Hilbert, S. Sommerfeldt, O. Gupta, and D. J. Herrell, High pe
      • R. C. Chu, R. E. Simons, and K. P. Moran, System cooling design
      • V. W. Antonetti, R. C. Chu, and J. H. Seely, Thermal design for
      • R. C. Chu, M. J. Ellsworth, E. Furey, R. R. Schmidt, and R. E. S
      • H. Bray, Computer Makers Sweat Over Cooling, The Boston Globe, 2
      • Y. Taur and J. Nowak, CMOS devices below 0.1 $\mu {\hbox{m}}$ Ho
      • K. Rose, R. Mangaser, C. Mark, and E. Sayre, Cryogenically coole
      • W. F. Clark, E. Badih, and R. G. Pires, Low temperature CMOS A b
      • R. F. Barron, Cryogenic Systems, 2nd ed. New York: Oxford Univ.
      • J. S. Kolodzey, Cray-1 computer technology, IEEE Trans. Compon.,
      • D. M. Carlson, D. C. Sullivan, R. E. Bach, and D. R. Resnick, Th
      • R. E. Schwall and W. S. Harris, Packaging and cooling of low tem
      • R. R. Schmidt, Low temperature electronics cooling, Electronics
      • R. R. Schmidt and B. Notohardjono, High-End server low temperatu
      • A. Fujisaki, M. Suzuki, and H. Yamamoto, Packaging technology fo
    • Heat Density Trends in Data Processing, Computer Systems and Tel
      • R. Schmidt, Effect of data center characteristics on data proces
      • R. Schmidt and E. Cruz, Raised floor computer data center: Effec
      • C. Patel, C. Bash, C. Belady, L. Stahl, and D. Sullivan, Computa
      • C. Patel, R. Sharma, C. Bash, and A. Beitelmal, Thermal consider
      • C. Patel, C. Bash, R. Sharma, M. Beitelmal, and R. Friedrich, Sm
      • C. Bash, C. Patel, and R. Sharma, Efficient thermal management o
      • H. Obler, Energy efficient computer cooling, Heating/Piping/Air
      • J. M. Ayres, Air conditioning needs of computers pose problems f
      • H. F. Levy, Computer room air conditioning: How to prevent a cat
      • R. W. Goes, Design electronic data processing installations for
      • W. A. Di Giacomo, Computer room environmental systems, Heating,
      • F. J. Grande, Application of a new concept in computer room air
      • F. Green, Computer room air distribution, ASHRAE J., vol. 9, no
      • M. N. Birken, Cooling computers, Heating, Piping Air Cond., vol
      • H. F. Levy, Air distribution through computer room floors, Build
    • Thermal Guidelines for Data Processing Environments . Atlanta, G
      • R. Schmidt, Thermal profile of a high density data center-method
    • R. C. Chu and Y. Joshi, Eds., Thermal Management, in National El